Explore our ISO 9001 certified range of ultra-high purity fused quartz components engineered for thermal diffusion, LPCVD, PECVD, and crystal growth processes.
The city of Graz, situated at the core of Styria’s renowned "Silicon Austria" technology triangle, stands as a primary European hub for microelectronics, sensor integration, power semiconductors, and advanced research institutions such as Silicon Austria Labs (SAL) and Graz University of Technology. As semiconductor fabrication facilities (fabs) in the region scale up production for Silicon Carbide (SiC), Gallium Nitride (GaN), and advanced silicon node technologies, the demand for high-reliability, zero-contamination wafer handling equipment has intensified.
At the center of thermal processing—encompassing oxidation, diffusion, oxidation annealing, and chemical vapor deposition (LPCVD/PECVD)—is the high-purity semiconductor quartz boat. Acting as the primary physical matrix that suspends silicon or WBG wafers during thermal cycles ranging from 1,000°C to over 1,350°C, the chemical purity, dimensional tolerance, and structural integrity of quartz boats directly dictate wafer yields, defect density, and process repeatability.
Donghai Kemzo Quartz Products Co., Ltd. leverages source-region quartz deposits in Donghai combined with proprietary thermal-refining technologies to manufacture transparent fused quartz with exceptional chemical inertness and structural resilience. Standard technical glass or inferior quartz grades contain residual trace elements such as Aluminum (Al), Iron (Fe), Calcium (Ca), and Sodium (Na). In high-temperature diffusion furnaces, these trace elements volatilize and migrate into the silicon substrate, causing unwanted lattice defects, minority carrier lifetime degradation, and catastrophic gate oxide breakdown.
Our semiconductor-grade quartz boats undergo rigorous chemical washing, vacuum degasification, and precision stress-relief annealing to guarantee ultra-low thermal expansion and zero micro-cracking at wafer contact points.
| Material Property | Kemzo Semiconductor Grade | Standard Commercial Grade | Impact on Graz Fab Operations |
|---|---|---|---|
| SiO2 Purity Level | > 99.999 % | 99.90 % | Eliminates heavy metal diffusion into Si/SiC wafers. |
| Na + K + Li (Alkali Metals) | < 0.2 ppm | > 2.5 ppm | Prevents devitrification & crystallization at 1200°C+. |
| Coefficient of Thermal Expansion | 5.5 × 10⁻⁷ / °C (20-300°C) | 5.8 × 10⁻⁷ / °C | Maximum thermal shock resistance during fast-ramp cycles. |
| Annealing Point | 1215 °C | 1140 °C | Maintains structural slot alignment under heavy wafer loads. |
| Surface Micro-roughness (Slots) | Ra < 0.2 µm (Fire-polished) | Ra > 0.8 µm (Ground) | Minimizes particle generation during automated loading. |
Fab lines in Graz utilize diverse furnace configurations depending on the device architecture—whether power MOSFETs, automotive sensors, or optical micro-systems. Kemzo Quartz custom-designs horizontal and vertical quartz boats tailored precisely to fab-specific end-effectors, robotics, and gas flow dynamics:
Established in 2011 in Donghai County, China's crystal capital, Donghai Kemzo Quartz Products Co., Ltd. operates state-of-the-art quartz processing workshops equipped with high-precision CNC diamond slotting machines, automated laser rod cutters, and hydrogen-oxygen flame welding units. Operating under an ISO 9001 quality management system, our plant executes a strict 5-stage quality protocol:
1. Spectrophotometric Sand Screening: Every batch of imported and regional high-purity quartz sand is analyzed via ICP-MS to ensure trace element concentrations meet optical and semiconductor standards before melting.
2. Precision CNC Machining & Slotting: Wafer slot widths, pitch distances, and angle depth are cut using custom diamond-tipped tooling to achieve tolerances within ±0.02 mm.
3. Micro-Flaw Flame Polishing: Machine-cut edges and wafer slots undergo temperature-controlled flame polishing to eliminate microscopic surface fractures that could act as stress concentrators during thermal cycling.
4. High-Temperature De-stress Annealing: Completed quartz boats undergo multi-hour thermal annealing at 1150°C followed by gradual controlled cooling to relieve internal mechanical strain.
5. Cleanroom Cleanliness & Export Packaging: Finished quartzware is cleaned in ultrasonic HF/N2 baths, inspected under high-intensity ultraviolet lights for inclusions, double-vacuum bagged in Class 100 cleanrooms, and packed in reinforced export wooden cases.